@novia-phd.bsky.social
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Authors from @ucf.bsky.social employ simultaneous in situ spectroscopic ellipsometry & quadrupole mass spectrometry to reveal new insights into ZnO thin film etching using acetylacetone + O₂ plasma. doi.org/10.1116/6.00... @avs-members.bsky.social
In situ, simultaneous spectroscopic ellipsometry and quadrupole mass spectrometry studies of ZnO etching using Hacac and O2 plasma
The etching of ZnO thin films using acetylacetone (Hacac) doses with long exposure times, followed by purging and subsequent exposure to O2 plasma, is studied i
doi.org
May 29, 2025 at 1:39 PM
Authors from @ucf.bsky.social employ simultaneous in situ spectroscopic ellipsometry & quadrupole mass spectrometry to reveal new insights into ZnO thin film etching using acetylacetone + O₂ plasma. doi.org/10.1116/6.00... @avs-members.bsky.social