Associate Editor of Chemistry of Materials, American Chemical Society
“Atomic Layer Innovations: New Pathways for Future Semiconductor Fabrication”
• #ASDep for future patterning
• AI-driven materials design via #ALDep
🕘 9 PM Seoul / 1 PM CET / 7 AM EST
🔗 voovmeeting.com/dm/xrmEzmbmY...
“Atomic Layer Innovations: New Pathways for Future Semiconductor Fabrication”
• #ASDep for future patterning
• AI-driven materials design via #ALDep
🕘 9 PM Seoul / 1 PM CET / 7 AM EST
🔗 voovmeeting.com/dm/xrmEzmbmY...
Yes—we actively look for bad #ALDep precursors as inhibitors!
Free to read/download until Jan 4th. authors.elsevier.com/a/1m6NhcXa-C...
Yes—we actively look for bad #ALDep precursors as inhibitors!
Free to read/download until Jan 4th. authors.elsevier.com/a/1m6NhcXa-C...
However, things have changed. Achieving nanoscale patterns with high reliability is now extremely challenging, and patterning is no longer just a supporting technique.
pubs.acs.org/page/cmatex/...
However, things have changed. Achieving nanoscale patterns with high reliability is now extremely challenging, and patterning is no longer just a supporting technique.
pubs.acs.org/page/cmatex/...
Also warning us to avoid Ni(CO)4
Also warning us to avoid Ni(CO)4