In situ, simultaneous spectroscopic ellipsometry and quadrupole mass spectrometry studies of ZnO etching using Hacac and O2 plasma pubs.aip.org/avs/jva/arti...
In situ, simultaneous spectroscopic ellipsometry and quadrupole mass spectrometry studies of ZnO etching using Hacac and O2 plasma pubs.aip.org/avs/jva/arti...
doi.org/10.1039/D4RA...
doi.org/10.1039/D4RA...
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Check us out online: prem2.cecs.ucf.edu
#PREM #DMR #NationalScienceFoundation